GasPro High-Temperature Gas Filter TEM-700 Series
High-performance membrane gas filter compatible with a maximum operating temperature of 400℃.
The GasProTEM-700 series is specially designed for reactive gases and halogenated microelectronics gases. It features an all-welded structure with a filter material of 0.01 microns. It is ideal for cases requiring high flow rates and low delta P, as well as for areas with limited space. The main body consists of a welded housing made of fiberglass and electropolished SUS316L, offering filtration performance that is 10 to 20 times higher than similar-sized membrane filters. To ensure cleanliness, it is purged with filtered nitrogen before shipment. The TEM-700 is intended for high-temperature applications (Max. 400°C) and is available in various connection types for easy installation.
- Company：エア・ウォーター・メカトロニクス株式会社 ST事業部
- Price：Other
